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Department of Biomedical Engineering

BioMEMS Microfabrication Facility

Female student wearing safety glasses, a green lab coat, and one blue latex glove as she works with a microspace.

The Biomedical Engineering Microfabrication suite is fully equipped for microfabrication of BioMEMS and microfluidic devices.

The facility is a class-1000 clean room, equipped with photolithography (EV Group EVG620 Optical Lithography System), Physical Vapor Deposition (PVD, Kurt Lesker PVD 75), Plasma Etching capabilities (Technics MicroRIE 800), XeF2 isotropic silicon etching (XACTIX Xetch X2C) and Parylene deposition (Specialty Coating Systems SCS PDS 2010 LABCOTER 2) equipment, along with smaller supporting equipment such as substrate spinners (Headway PWM32), programmable digital hot plates (EchoTermJ HP40), Surface Profiler (DekTak3), wirebonder (Westbond 7700B), and Probe Station (Micromanipulator 6200).